Parametric decay instabilities in the HELIX helicon plasma source
نویسندگان
چکیده
منابع مشابه
Experimental evidence of parametric decay processes in the variable specific impulse magnetoplasma rocket (VASIMR) helicon plasma source
Decay waves have been observed in the megahertz range in the helium plasma generated by the variable specific impulse magnetoplasma rocket magnetoplasma thruster. They are measured using one of the tips of a triple probe connected to a 50 V input of a spectrum analyzer via a dc block (a small capacitor). The maximum amplitude of all waves is in the center of the plasma and does not appear corre...
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There is interest in using a helicon plasma source in propulsive applications as both an ion source and as a thruster. Developing a helicon thruster requires a performance baseline as a basis for future optimization and expansion. The thrust of a helicon is measured using an null-type inverted pendulum thrust stand at a pressure of 2x10 -5 Torr through the operating range of 215-840 W RF power,...
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Kyoichiro Toki, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei-city, Tokyo 184-8588 JAPAN Shunjiro Shinohara, Kyushu University, 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JAPAN Takao Tanikawa, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-1292, JAPAN Tohru Hada, Kyushu University, 6-1 Kasuga-koen, Kasuga, Fukuoka 816-8580, JAPAN Ikkoh Funaki, Japan Aeros...
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A helicon antenna that sits remotely outside the vacuum system is attached to a magnetron sputtering system. This increases the electron temperature, which increases the ionization of the sputter flux for achieving ionized physical vapor deposition (IPVD). There are no shadowing and contamination problems, unlike other IPVD devices with immersed coils, since the helicon antenna is outside the v...
متن کاملLarge-area helicon plasma source with permanent magnets
Abstract A helicon plasma source has been designed using annular permanent magnets to produce the required DC magnetic field (B-field). With the discharge tube located in the remote field, rather than the internal field of the magnet rings, the plasma can be injected into a processing chamber containing the substrate to be treated. The discharge tube, radiofrequency (RF) antenna and magnet size...
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ژورنال
عنوان ژورنال: Physics of Plasmas
سال: 2003
ISSN: 1070-664X,1089-7674
DOI: 10.1063/1.1528182